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1) S. Acquaviva, A.P.
Caricato, M.L. De Giorgi, A. Luches and A. Perrone, Spectroscopic
studies during pulsed laser ablation deposition of C-N films, Appl. Surf.
Sci. 109/119, 408 (1997)
2) A. Luches, A.P. Caricato, E. D’Anna, G. Leggieri, M. Martino, A.
Perrone, G. Barucca, G. Majni, P. Mengucci, R. Alexandrescu, I.N. Mihailescu
and J. Zemek, Parametric study of C-N films deposited by reactive laser
ablation, Proc. SPIE Vol. 3093, 176 (1997)
3) S. Acquaviva, A.P. Caricato, M.L. De Giorgi, G. Dinescu, A. Luches
and A. Perrone, Evidence for CN in spectroscopic studies of laser-induced
plasma during pulsed irradiation of graphite targets in nitrogen and
ammonia, J. Phys. B: At Mol. Opt. 30, 4405 (1997)
4) A. Luches, A.P. Caricato, G. Leggieri, M. Martino, G. Barucca, P.
Mengucci and J. Zemek, Laser reactive ablation deposition of carbon nitride
thin films, Proc. SPIE Vol. 2789, 293 (1997)
5) E. Aldea, A.P. Caricato, G. Dinescu, A. Luches and A. Perrone,
Optical emission diagnostic of leser-induced plasma during CN? film
deposition, Jpn. J. Appl. Phys. 36, 4686 (1997)
6) A.P. Caricato, G. Leggieri, A. Luches, A. Perrone, E. Gyorgy, I.
N. Mihailescu, M. Popescu, G. Barucca, P. Mengucci, J. Zemek and M. Trchova,
Characterization of C-N thin films deposited by reactive eximer laser
ablation of graphite targets in nitrogen atmosphere, Thin solid films 307,
54 (1997)
7) A. Perrone, A. P. Caricato, A. Luches, M. Dinescu, A. Andrei, C.
Ghica and V. Sandu, Boron carbonitride films deposited by sequential pulses
laser deposition, Appl. Surf. Sci. 127/129, 692 (1998)
8) A. Perrone, A.P. Caricato, A. Luches, M. Dinescu, C. Chiga, V.
Sandu and A. Andrei, Bororn carbonitride films deposited by pulsed laser
ablation, Appl. Surf. Sci. 133 n. 4, 239 (1998)
9) C. Vivine, M. Dinescu, P. Meheust, C. Boulmer-Leborgne, A.P. Caricato
and J. Perrier Nitride-molecule synthesis in plasma produced by reactive
laser ablation assisted by RF discharge for thin-film deposition Appl. Surf.
Sci. 127, 668 (1998)
10) M.L. Polignano, N. Bellafiore, D. Caputo, A.P. Caricato, A.
Modelli and R. Zonca, Surface recombination velocity from photocurrent
measurements: validation and applications, J. Electrochem. Soc. 146, 4640
(1999)
11) M.L. Polignano, A.P. Caricato, A. Modelli and R. Zonca, Surface
characterization by photocurrent measurement Appl. Surf. Sci. 154, 276
(2000)
12) M.L. Polignano, A.P. Caricato, A. Modelli and R. Zonca, A novel
method for the simultaneous characterization of bulk impurities and surface
states by photocurrent measurements, J. Electrochem. Soc. 147 n. 4, 1577
(2000)
13) A.P. Caricato, F. Cazzaniga, G.F. Cerofolini, B. Crivelli, M.L.
Polignano, G. Tallarida, S. Valeri, and R. Zonca, Nitridation by NO or by
N2O of Si-SiO2 interfaces of oxide grown in dry or wet ambients” MRS Spring
Symposium 1999, San Francisco
14) B. Crivelli, R. Zonca, M.L. Polignano, F. Cazzaniga, M. Alessandri,
A.P. Caricato, M. Bersani, M. Sbetti, L. Vanzetti, G.C. Xing, G.E.
Miner, N. Atici, S. Kuppurao and D. Lopes, Ultra-thin NO/N2O oxynitride
dielectric for advanced flash memory applications: single wafer and batch
technology” MRS 99 Fall Symposium, Boston
15) M.L. Polignano, M. Alessandri, D. Brazzelli, B. Crivelli, G. Ghidini, R.
Zonca, A.P. Caricato M. Bersani, M. Sbetti, L. Vanzetti, G.C. Xing,
G.E. Miner, N. Astici, S. Kuppurao and D. Lopes Chatacterization of nitrided
silicon-silicon dioxide interfaces, Symp MRS Proc. 591, 207 (2000)
16) G.F. Cerofolini, A.P. Caricato, L. Meda, N. Re, A. Sgamellotti, A
Quantum Mechanical Study of Nitrogen Bonding Configurations at the Nitrided
Si-SiO2 Interfaces via Model Molecules, Phys. Rev. B 61 n. 20, 14157 (2000)
17) M.L. Polignano, M. Alessandri, B. Crivelli, R. Zonca, A.P. Caricato,
M. Bersani, M. Sbetti and L. Vanzetti The impact of the process on the
properties of the Si-SiO2 interface, J. non Cryst.
Sol. 280 n. 1-3, 39 (2001)
18) M.L.
Polignano, D. Caputo and A.P. Caricato Caratterizzazione di
un’interfaccia semiconduttore/ dielettrico mediante misure di fotocorrente
Brevetto Europeo n. 99830030.5 (submitted)
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